MOCVD4.2

MOCVD c AIXTRON Webseite V2

The production of semiconductors is a time-intensive process that is carried out using cost-intensive equipment. It is important to identify potential problems, both in general in the respective equipment and within a specific manufacturing process, at an early stage in order to avoid unnecessary costs and thus secure the competitiveness of the company.

The aim of the MOCVD4.2 project is to increase the production capability of the technologies of Aixtron SE, which develops equipment for the production of semiconductors. This is to be achieved through Industry 4.0 approaches, i.e. with networked and automated machine concepts, automated data analyses, machine learning and precise process control. The project thus covers the areas of predictive maintenance, predictive quality and process control. Here, state-of-the-art AI methods within time series analysis and causal models are used, among other things.

Keyfacts
Project partners
Aixtron SE, Azur Space Solar Power GmbH, LayTec AG, IMS CHIPS Stuttgart
Project Holder
Projektträger Jülich
Funding Body
Bundesministerium für Wirtschaft und Energie
Project Duration
01.01.2019-31.12.2021